Keysight’s P9000 semiconductor parametric test solution

Keysight announced the third-generation ot its parametric test solution

  • The Keysight P9000 is an semiconductor parametric test solution used in R&D and the mass production of logic and memory ICs.
  • The third generation of the P9000, with its new parametric test unit module, according to Keysight boosts test speed and overcomes challenge of capacitance measurement.
  • The new test unit module allows the measurement of leaky capacitance of cutting edge semiconductor processes and provides 100-pin parallel capacitance measurement.

Keysight Technologies announced the third generation of its P9000 series parallel parametric test system. The system, according to Keysight, accelerates the fast ramp of new technology and reduces the cost-of-test in the development and manufacturing of advanced semiconductor logic and memory Ics.

When the P9000 was introduced, it enabled 100-pin parallel measurements for multiple devices on silicon wafer by using a dedicated per-pin test unit module. The module had all the typical measurement functions required for parametric test (e.g., voltage, current, capacitance, pulse, and frequency). In addition, direct charge measurement (DCM) technology enabled fast, 100-pin parallel capacitance measurements.

The second generation of the P9000 included the Keysight developed rapid Vt measurement technology. The rapid Vt measurement technology provided single measurements of threshold voltage (Vt) that were more than four times faster than any of the conventional test methods. In addition to 100-pin parallel measurement, faster single parameter measurements provided by the DCM and rapid Vt measurement technology enabled improvements in test speed.

With the introduction of the third generation of P9000 (with the new per-pin parametric test module, the Keysight P9015A), the tester has shortened the time of capacitance measurements to address the trend of increasing test volumes of capacitance due to multi-layer interconnection and new device structure.

The new module enables the measurement of leaky capacitance by using its enhanced DCM technology and enables greater than two times faster single capacitance measurement with data correlation for various type of capacitance (compared to conventional LCR meter). In addition, the 100-pin parallel capability of capacitance measurement allows, according to Keysight, to achieve throughput improvement.